Chrome Photoplate Positive Process Sheet
| Step |
Time (In Seconds) |
Description |
| 1) |
-- |
Expose photoplate. Determine exposure empirically. |
| 2) |
45 |
PPD-450 Developer. Develop with gentle agitation at room temp. (70°F +/- 1°F). Develop in tank, spray or tray mode. |
| 3) |
60 |
Rinse with filtered DI water using immersion or spray. |
| 4) |
30 - ? |
CEP-200 Etchant. Etch at room temp. (70°F +/- 1°F). Different manufacturers have different thickness and quality of chrome layers. Determine empirically the first etching times. (Normal etch rate is 33Å chrome/sec). Etch typically to clear time plus 10% over etch. |
| 5) |
60 |
Rinse with filtered DI water using immersion or spray. |
| 6) |
5 minutes |
PRS-100 Stripper. Strip photoresist at room temp. with agitation. |
| 7) |
2 minutes |
Wash in filtered DI water followed with a forceful spray. |
| 8) |
Dry |
Spin dry |
Determine exposure empirically to visually clear the image in 30-45 seconds. Then
over-develop beyond the visually clear time by 15% of develop time. This will clean
up any traces of non-visual photoresist on the plate.
NOTE:
Use PCS-605 Photomask Cleaning Solution to reclean masks
after handling.
|